JPH0519951Y2 - - Google Patents

Info

Publication number
JPH0519951Y2
JPH0519951Y2 JP1987160478U JP16047887U JPH0519951Y2 JP H0519951 Y2 JPH0519951 Y2 JP H0519951Y2 JP 1987160478 U JP1987160478 U JP 1987160478U JP 16047887 U JP16047887 U JP 16047887U JP H0519951 Y2 JPH0519951 Y2 JP H0519951Y2
Authority
JP
Japan
Prior art keywords
heat treatment
boat
end plates
processed
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987160478U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0165130U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987160478U priority Critical patent/JPH0519951Y2/ja
Publication of JPH0165130U publication Critical patent/JPH0165130U/ja
Application granted granted Critical
Publication of JPH0519951Y2 publication Critical patent/JPH0519951Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987160478U 1987-10-20 1987-10-20 Expired - Lifetime JPH0519951Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987160478U JPH0519951Y2 (en]) 1987-10-20 1987-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987160478U JPH0519951Y2 (en]) 1987-10-20 1987-10-20

Publications (2)

Publication Number Publication Date
JPH0165130U JPH0165130U (en]) 1989-04-26
JPH0519951Y2 true JPH0519951Y2 (en]) 1993-05-25

Family

ID=31442575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987160478U Expired - Lifetime JPH0519951Y2 (en]) 1987-10-20 1987-10-20

Country Status (1)

Country Link
JP (1) JPH0519951Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6112026A (ja) * 1984-06-27 1986-01-20 Fujitsu Ltd 縦型加熱炉
JPH0219959Y2 (en]) * 1985-06-05 1990-05-31

Also Published As

Publication number Publication date
JPH0165130U (en]) 1989-04-26

Similar Documents

Publication Publication Date Title
US6109677A (en) Apparatus for handling and transporting plate like substrates
JP2574608B2 (ja) ウェハーキャリア
KR100530407B1 (ko) 반도체 제조 장치
JP2002280443A (ja) ディスクキャリヤ
JPH0519951Y2 (en])
JPH03116731A (ja) 半導体ウエハ用移送装置
JPS633446B2 (en])
JP3692697B2 (ja) ウェハ支持体及び縦型ボート
JPH04304652A (ja) 熱処理装置用ボート
US5270482A (en) Wafer carrier process platform
JPS63278225A (ja) 熱処理用ボ−ト
JP2630366B2 (ja) 板状体の搬入搬出方法および搬入搬出装置
JPS61198644A (ja) ウエハの移し替え方法
JPS62229932A (ja) 縦型収納治具
JPS632317A (ja) 縦型処理装置およびその治具
JPH09298236A (ja) 基板支持治具及び基板支持手段
JP2533551Y2 (ja) 半導体ウエハ保持治具
JP2593660B2 (ja) ウェーハ熱処理用治具
JP2585697B2 (ja) 異径被処理体用ボート
JPS6263422A (ja) シリコンウエ−ハ処理用治具
JPH07142561A (ja) ウエハの保持装置
JP3034901B2 (ja) ウエハボート
JPH0219959Y2 (en])
JPH1140659A (ja) 半導体ウエハの熱処理用縦型ボート
JPS6311718Y2 (en])